The MNE (Micro and Nano Engineering) conference is a prestigious annual event that serves as a global platform for experts, researchers, and innovators in the field of micro and nanotechnology. This conference brings together leading minds from academia and industry to share cutting-edge research, exchange ideas, and explore emerging trends and breakthroughs in the world of micro and nanoengineering.
The MNE conference 2023 at Berlin was an exceptional experience, made even more memorable by the honor of winning the Best Poster Award in the category: Novel developments in nano/micro fabrication methods and processes for our latest work on resistless EUV lithography. In this work, we have demonstrated structures of 75 nm wide patterned on several silicon surfaces by EUV light without using a photosensitive layer coating. This prestigious recognition not only acknowledges our dedication to micro and nanotechnology research but also underscores the conference commitment to fostering innovation and excellence in this field. The conference provided a unique platform to showcase our work, engage with fellow researchers, and gain valuable insight into the latest developments in micro and nanoengineering. Last but not least, MNE is undoubtedly a constant drive of our passion to push the boundaries of technology at the smallest scales.