The Electron Cyclotron Resonance (ECR) source
The ECR source consists of a ceramic plasma chamber located in a homogeneous magnetic field of about 87.5 mT provided by permanent magnets. A 2.45 GHz standard microwave generator provides typically 350W of microwave power from the backside while the front points towards the extraction system. An additional coil around the chamber allows to fine-tune the magnetic field to precisely match the ECR resonance condition. In resonance, free electrons are heated by the microwave-field. The hot electrons dissociate and/or ionize the hydrogen gas, which is continously fed into the plasma chamber.
The complete ion source assembly is on a 60 kV-high-voltage platform. Positively charged ions (H+, H2+ and H3+) are dragged out and focused by the potential difference of the extraction system.
