Who we are
The lab provides in-house deposition of supermirror coatings for neutron optical elements such as neutron guides, polarizers and focusing tools. We specialize in the development and production of these multilayer system with Ni/Ti up to m=6 and polarizing coatings up to m=4. In addition, we provide our expertise in multi- and single layer deposition to all PSI groups for instrumentation and sample preparation.
What we offer
The sputtering lab is equipped with two inline sputtering machines. We deposit metals, semi-conductors and insulators with an Ar plasma. Typical layer thicknesses range from 1 to 1000 nm.
| Z600 | TIPSI | |
|---|---|---|
| Maximum area coated | 380 mmx560 mm | 50 mm x 200 mm |
| Number of targets | 3 | 3 |
| DC-magnetron sputtering | Yes | Yes |
| RF sputtering | No | Yes |
| Reactive gases | O2, N2, artificial air | O2, N2, external port |
| Substrate cleaning via glow discharge | Yes | On demand |
| Substrate heating during deposition | No | Yes |
For any further information contact Dr. Christine Klauser christine.klauser@psi.ch