| Semester | Autumn Semester |
|---|---|
| Lecturers | T. Lippert |
| Periodicity | yearly course |
| ECTS Points | 2 ECTS Points can be obtained (1) |
| Time | 10:00-12:00 (start at 9:45 with a possible break of 15 min.) |
|---|---|
| Location | HCI D2 |
| Lecture Notes | Will be handed out at the first lecture (free of charge) |
| Topics |
|---|
| Laser-History and Introduction |
| Micro- and Nanotechnology |
| Lithography |
| Non-Optical Lithography I |
| Photoresists |
| Laser-Welding/Cutting and Drilling |
| Laser Cleaning |
| Laser Ablation as Dry Etching Technique |
| Laser Ablation of Polymers |
| Laser Ablation of Polymers Designed for Ablation |
| Laser-Spectroscopy/Laser and Surfaces I |
| Lasers and Surfaces II |
| Thin Films |