| Ressource | Status | Description |
|---|---|---|
| Status optics and monochromator | OK | Wideband beam with a spectral bandwidth of ~3% used in most EUV-IL exposures. Highly monochromatized beam (<0.1% BW) available for special applications |
| Status sample and environment | OK | Standard wafers up to a size of 200 mm diameter as well as chips of various sizes can be exposed in the system |
| Status endstations and detectors | OK | |
| Status analysis tools | OK | |
| Status operation | OK |
Legend: OK PROBLEMS ERROR