Free and open source software for SEM image metrology.
Download and installation instructions.
| Software version | Operative system | Development status | Description |
|---|---|---|---|
| SMILE 1.0 | Windows 10 | Stable | Official PSI resist screening program software for L/S analysis |
| SMILE 1.0 | Mac OSX | Stable | |
| SMILE 2.0 | Windows 10 | Alpha | L/S LER analysis and contact metrology |
Windows 10 installation
Both SMILE 1.0 and SMILE 2.0 Windows installer require admin rights to install SMILE. The installers will check if a Matlab runtime installation is present on the PC. If not, the installer will proceed do download and install the latest Matlab libraries.