About the PSI Cleanroom
The new PSI cleanroom, PICO (Park Innovaare Cleanroom for Optics and innovation) is located in Park Innovaare, on the West side of PSI.
PICO is operated by the Nanotechnology group, which is part of the LNQ laboratory in the PSI Center for Photon Science division.
PICO was opened in May 2024 and the old Cleanroom laboratories in ODRA were closed in December 2024.
PICO is a 450 m2 classes 5 and 6, professionally designed and equipped state-of-the-art cleanroom lab.
Another 150m2 of space for external companies has been rented by Swiss PIC (the Swiss Photonics Integration Center).
The PSI cleanroom welcomes external academic and industrial customers, that can get access to the full cleanroom infrastructure or pay for the nanofabrication services provided by the Nanotechnology group.
For more information please contact Dr. Vitaliy Guzenko.
Lithography
Raith/Vistec EBPG 5000Plus
:: Electron Beam Direct Writer
:: Maskless Lithography
Contact: Kevin Hofhuis
Heidelberg DWL66+
:: 200mm Direct Laser Writer
:: Maskless Lithography
Contact: Konrad Vogelsang
Phable R200
:: Displacement Talbot Lithography
:: Photolithography
Contact: Konstantins Jefimovs
Nanoscribe GT+
:: Two-photon Direct Writer
:: Maskless Lithography
Contact: Kevin Hofhuis
SUSS MA8-BA6
:: 200mm Mask Aligner
:: Photolithography
Contact: Dario Marty
SUSS MA6-BA6
:: 150mm Mask Aligner
:: Photolithography
Contact: Dario Marty
Etching
SPTS DRIE
:: Rapier Omega LPX Deep Reactive Ion Etcher
:: Plasma Technology
:: 200mm
Contact: Konstantins Jefimovs
Oxford DRIE
:: PlasmaLab 100 ICP Deep Reactive Ion Etcher
:: Plasma Etching
:: 100mm
Contact: Christopher Wild
Sentech ICP RIE
:: SI500 ICP Reactive Ion Etcher
:: Plasma Etching
:: 200mm
Contact: Christopher Wild
Oxford ICP RIE
:: PlasmaLab 100 Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE)
:: Plasma Technology
:: 100mm
Contact: Christopher Wild
Oxford RIE
:: PlasmaLab 80 Reactive Ion Etcher (RIE80)
:: Plasma Technology
:: 100mm
Contact: Christopher Wild
Oxford IonFab 300Plus
:: Ar Ion Milling / Ion Beam Deposition (IBD) Tool
:: Plasma Technology
:: 100mm
Contact: Konstantins Jefimovs
Wet Chemistry Area
:: Etching with acids and alkali
:: Sample Processing
Contact: Dario Marty
Photolithography Area
:: Exposures Development
:: Sample Processing
Contact: Dario Marty
E-beam Lithography Area
:: Exposures Development
:: Sample Processing
Contact: Dario Marty
Thin Films Deposition
Evatec BAKUNI
:: e-beam Vacuum Deposition
:: Thin Film Technology
:: 200mm
Contact: Dario Marty
Evatec CLN200II
:: Magnetron Sputtering Vacuum Deposition
:: Thin Film Technology
:: 200mm
Contact: Mihai Gabureac
Oxford PECVD
:: PlasmaLab 80+ Plasma Enchanced Chemical Vapor Deposition
:: Thin Film Technology
:: 100mm
Contact: Christopher Wild
Picosun PE-ALD
:: R200 Plasma Enhanced Atomic Layer Deposition (PE-ALD)
:: Thin Film Technology
:: 200mm
Contact: Vitaliy Guzenko
Sample Inspection
Zeiss Supra 55VP
:: Scanning Electron Microscope (Variable Pressure mode)
:: Sample Inspection
Contact: Mihai Gabureac
Hitachi Regulus 8230
:: Scanning Electron Microscope with EDX
:: Sample Inspection
Contact: Mihai Gabureac
KEYENCE VK-X3100
:: 3D Optical Profiler
:: Sample Inspection
Contact: Konrad Vogelsang
Leica DM800M
:: Digital Light Microscope
:: Sample Inspection
Contact: Jana Lehmann
Nikon INM200
:: Light Microscope
:: Sample Inspection
Contact: Jana Lehmann
Openiris
Use Openiris to make reservations, request training and submit issues for all the tools in PICO.
You can find all the tools by searching for "cleanroom" in the "Enter filter texts" top left window, or for the tool name listed on this webpage.
After training, you can make new bookings and see the current reservations in the Timeline.