Keyence VK-X3100 is a non-contact 3D surface profiler. It enables capturing images and performing the profile, roughness and film thickness analysis. The measurement head is equipped with semiconductor laser with the wave length of 404 nm and white LED. To reach the best performance, it uses laser confocal scanning, focus variation, adn while light interferometry measurement methods. The motorized sample stage allows for automatic inspection of up to 200mm wafers.
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