Facilities & Equipment

Laboratories

Cleanrooms

Cleanroom Laboratories

Surface Science Lab

Surface Science Lab

Microscopy Labs

Zeiss VP55 Scanning electron microscope

Scanning Electron Microscopy

Scanning Probe Microscopy

Beamlines and Endstations

XIL-II (X09LB): EUV Beamline at SLS

PEARL (X03DA): Photoemission and Atomic Resolution Laboratory

IR Beamline (X01DC): Ultra high resolution FTIR

Cristallina-Q: Quantum Science at SwissFEL

Facilities

XIL Facility at SLS

XIL Facility at the SLS

Nanoimprint Lithography

Nanoimprint Lithography

Electron Beam Lithography

Electron Beam Lithography